MEMS惯性传感器优势解析

　　参考文献

　　[1] B. Vigna, “MEMSEpiphany,”MEMS2009 Conference, Sorrento Italy, January

　　26, 2009.

　　[2] Source, iSuppli Corporation, See: http://www.isuppli.com

　　[3] B. De Masi and S. Zerbini, “Process builds more sensitive structures,” EE Times,

　　November 22, 2004.