ACS晶圆级可靠性（WLR）测试系统应用指南

ACS晶圆级可靠性（WLR）测试系统应用指南
Number 2847


Application Note ACS Integrated Test System for High
Series Throughput WLR Testing

using an ACS integrated test system and Shared Pad/Pin Test Structure
an SMU (source-measure unit)-per-pin Consider the shared pin device in Figure 3.
configuration. Using Keithley’s Series Four MOSFETs share the gate and bulk pin
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